Semiconductor International - July 01, 2007
Cover Story
Advanced Process and Equipment Control Enables New Device Nodes
Advanced process and equipment control (APC/AEC) has experienced a rapid evolution. As the industry continues progressing toward increasingly complex and unforgiving processes of shorter durations and higher criticality, some form of APC/AEC must be included for yield success, which is why all major semiconductor OEMs offer tools with a form of it.
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