Semiconductor International - August 01, 2004
Cover Story
Increasing Yields for Engineered Substrates
Limitations in bulk silicon are making device manufacturers seriously consider the advantages of engineered substrates, despite their problems and difficulties. Fabs now have little choice but to proceed with these new materials, while high-throughput, high-sensitivity metrology and inspection systems that accommodate the complexities of multilayer stacks will be critical for high-yield p...
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