Semiconductor International 12/01/2002 Table of Contents

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Semiconductor International - December 01, 2002

Cover Story

2002 Editors' Choice Best Product Awards
This year, the Editors' Choice Best Product Awards program recognizes 12 products used in semiconductor and related manufacturing. The 2002 Grand Award goes to iConnect e-diagnostics from Brooks-PRI Automation.

Features

Technology News

Clean Processing

Advanced Role of Ozone in Wet Processing

Emerging Technologies

Light-Emitting Silicon: As Good as GaAs

Inspection, Measurement and Test

Holograms Fathom High-Aspect-Ratio Features

Lithography

Chromeless Phase Lithography Offers Simpler RET

Materials Science

IMEC Investigates High-k Materials for
Sub-90 nm CMOS Technologies

Semiconductor Packaging

Diamonds in the Rough

Wafer Processing

New Speed Records for Transistors, ICs

Yield Management

Can High-Pressure Microscopy Save Mask Metrology?

Departments

Asset Management

Patent Flexibility
SEC/N Thoughts

Economic Indicator

Electronics Industry Update
Fab Update: Adding Future Wafer Capacity
Semiconductor Equipment Monitor

Editorial

The Philo T. Farnsworth Circus and Other Stories

Industry Watch

SIA Bullish on 2003-2004; Focused Companies Will Prevail

Market Focus

Whipsaw

Movers and Shakers

Charles Winston, GSI Lumonics President/CEO

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