Semiconductor International - August 01, 2001
Cover Story
Wafer Cleaning Confronts Increasing Demands
With the strength and breadth of the current downturn, some might say that
semiconductor manufacturing has become a dirty business. But others know that
chipmakers these days are cleaning more than ever. As feature sizes shrink,
contamination becomes more problematic, encouraging manufacturers to keep the
wafers cleaner throughout the manufacturing process.
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