Semiconductor International - May 01, 2001
Cover Story
Industry Divides on Low-k Dielectric Choices
Like the political divide in the latest U.S. presidential election, the
semiconductor industry is split when it comes to identifying the best low-k
dielectric material. With the notable exception of Intel, several device
manufacturers, including AMD, Motorola, IBM, Infineon, TSMC and UMC, have
announced intentions to use low-k materials at the 0.13µm
generation.
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