Semiconductor International - January 01, 2000
Cover Story
Who Will Gamble at 0.13µm?
The transition from 0.18 to 0.13µm devices represents an enormous leap in
semiconductor device performance that will take between two and three years to
implement at leading-edge logic, memory and foundry fabs. By then, IC
manufacturers will have made some very risky decisions regarding the number of
tool platform and materials changes required to produce their
devices.
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