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Applied Announces TSV Etcher, In-Fab Mask Inspection Capability

Applied Materials Inc. announced its Silvia deep silicon etcher for creation of the smooth sidewalls required for 3-D interconnects. Also, the company said it is offering a new version of its Aera2 mask inspection tool for use within a fab’s lithography cell, rather than at an external mask shop. The Aera2 for Lithography system is needed for double patterning, where mask critical dimensions must be closely watched, the compay said.

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