Semiconductor International : Wafer Processing Report
November 26, 2008
IN THIS EDITION
NEWS
 
» Intel, Micron Move Into Mass Production With 34 nm NAND Flash
» TSMC Begins Production of 40 nm Designs
» ISMI Outlines 450 mm Wafer, NGF Roadmaps
» Logic Technologies Face Off at IEDM
» IBM Offers 45 nm SOI Foundry Solution
» SMIC Receives U.S. Licenses for 32 nm Production
EDITOR'S PICKS
 
» Measuring Material, Dopant Loss From Post-Implant Wafer Cleans
» Resistivity Reduction Enables Tungsten Scaling
» December Sneak Peek: Optimize Wafer Thickness for 450 mm
PRODUCTS
 
» High-Integrity Seal
» Vacuum-Compatible USB Feedthrough
UPCOMING EVENTS
 
Dear Subscriber,

It's an exciting month for sub-45 nm production: Intel and Micron announced on Monday that they are entering mass production of 34 nm NAND flash devices with their joint venture, while TSMC rolled out 40 nm designs for several of its customers. It seems that despite the laws of physics and the high cost of technology progression, the leading device makers always find a way to make it happen. And speaking of making it happen, 450 mm wafer testing and standardization are progressing despite far-ranging uncertainty on the topic. We also have a sneak peek at a 450 mm article that will run in our December print issue -- it closely examines the selection of wafer thickness based on a range of factors including wafer sag, slip and yields. Catch up with the latest advances here, and keep up to date on our Wafer Processing Technology Channel:

www.semiconductor.net/wafer

Laura Peters, Editor-in-Chief
lpeters@reedbusiness.com

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NEWS

Intel, Micron Move Into Mass Production With 34 nm NAND Flash
Business Wire, 11/24/2008

Intel Corp. and Micron Technology Inc. announced mass production of their jointly developed 34 nm, 32 Gb multi-level cell (MLC) NAND flash memory device. More

TSMC Begins Production of 40 nm Designs
David Lammers, News Editor -- Semiconductor International, 11/17/2008

TSMC said it is now in production of 40 nm designs for a wide variety of customers, ranging from Altera to Sun Microsystems. Although Qualcomm and others have used a TSMC 45 nm process, TSMC Vice President Di Ma said the company developed an IP platform and design support ecosystem for the 40 nm design rules. More

ISMI Outlines 450 mm Wafer, NGF Roadmaps
David Lammers, News Editor -- Semiconductor International, 10/27/2008

ISMI managers described progress at the 450 mm wafer Interoperability Test Bed, and described the Phase 2 roadmap at last month's ISMI Symposium on Manufacturing Effectiveness. Also, the Next Generation Factory program at ISMI is continuing work on cycle time improvements for existing and greenfield 300 mm wafer fabs, including support for 12-wafer lots. More

Logic Technologies Face Off at IEDM
David Lammers, News Editor -- Semiconductor International, 10/28/2008

At the International Electron Devices Meeting (IEDM), coming up Dec. 15-17 in San Francisco, IBM and its partners AMD and Freescale will present a thin SOI technology used to create a 22 nm functional SRAM with a cell size of 0.1 um2. Intel researchers will detail their 32 nm logic platform, which delivers drive currents of 1.55 mA/um for the NMOS and 1.21 mA/um for the PMOS transistors. More

IBM Offers 45 nm SOI Foundry Solution
David Lammers, News Editor -- Semiconductor International, 11/10/2008

IBM is offering a 45 nm SOI foundry solution to customers seeking to reduce active power consumption. ARM developed an SOI standard cell library, in conjunction with SOI wafer vendor Soitec, that eases SOI designs. Chartered will provide a second-source foundry capability for high-volume SOI customers. More

SMIC Receives U.S. Licenses for 32 nm Production
Suzanne Deffree, Managing Editor, News -- Electronic News, 10/27/2008

As early as Jan. 1, the foundry can launch 32 nm logic process development in all of its own manufacturing facilities and can start 32 nm flash R&D in its 300 mm fab in Wuhan, China. More

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EDITOR'S PICKS

Measuring Material, Dopant Loss From Post-Implant Wafer Cleans
Nikki Edleman, IBM Microelectronics, Hopewell Junction, N.Y.; Yong-Siang Tan, Chartered Semiconductor Mfg. Ltd., Singapore; Tom Tillery, Stephen Savas, Andreas Kadavanich and Allan Wiesnoski, Mattson Technology, Fremont, Calif. -- Semiconductor International, 11/1/2008

Maintaining the integrity of ultrashallow junctions (USJs) after exposure to an increasing number of high-dose implant resist cleaning steps is critical for logic device manufacturing at the 45 nm node and beyond. Use of SiGe in the PMOS regions adds an additional material challenge. A new short loop method provides accurate relative measurements of amorphized silicon or SiGe loss caused by different types of strip/clean processes. More

Resistivity Reduction Enables Tungsten Scaling
Frank Huang, Anand Chandrashekar and Michal Danek, Novellus Systems Inc., San Jose -- Semiconductor International, 11/1/2008

As features shrink beyond 32 nm, conventional pulsed nucleation layer (PNL) will not provide the necessary resistivity performance. Tungsten nucleation and CVD fill developments can extend ALD tungsten to 2X nm features and provide needed resistivity. More

December Sneak Peek: Optimize Wafer Thickness for 450 mm
Tadashi Kanda, Toshiyuki Fujiwara and Kazushige Takaishi, SUMCO Corp., Tokyo -- Semiconductor International, 11/24/2008

Wafer thickness significantly affects costs and yield in wafer and device manufacturing. To avoid the problems experienced at 300 mm, the optimum thickness for 450 mm must be targeted. More

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PRODUCTS

High-Integrity Seal

Designed for aggressive, wet processing applications, the patent-pending Turcon Variseal PS is a poly ether ether ketone (PEEK) energized seal with extremely low leach-out. This product is notable for its engineering integrity, all-polymer construction and no metallic components. Trelleborg Sealing Solutions, Fort Wayne, Ind. More

Vacuum-Compatible USB Feedthrough

This hermetic, vacuum-compatible 2.0 USB feedthrough has an operating temperature of 160°C, with a bakeout temperature of 200°C. Insulator Seal, Sarasota, Fla. More

UPCOMING EVENTS

Dec. 3-5: SEMICON Japan

Jan. 20-22: SEMICON Korea

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