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February 22, 2008 |
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IN THIS EDITION |
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NEWS |
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EDITOR'S PICKS |
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PRODUCTS |
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UPCOMING EVENT |
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Dear Subscriber,
Toshiba and SMIC gave us some welcome news in this uncertain economic climate with plans to build multiple fabs. Toshiba will build two fabs in Japan and SMIC will build two fabs in China. Meanwhile, equipment start-ups are alive and well. A company called Surfect Technologies has developed an innovative single-wafer electrochemical deposition technology using ultrasonic energy. Remember that you can always find other useful information at our Wafer Processing Technology Channel:
www.semiconductor.net/wafer
Peter Singer, Editor-in-Chief
sieditor@aol.com |
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Toshiba Plans New Memory Fabs
David Lammers, News Editor — Semiconductor International, 2/19/2008
Toshiba Corp. (Tokyo) announced that it will build two fabs in parallel, one at its existing memory complex in Yokkaichi and another in Iwate in northeastern Japan. Separately, SanDisk Corp. (Milpitas, Calif.) and Toshiba said they have signed a non-binding memorandum of understanding to form a new production joint venture and construct a new 300 mm wafer fab in Japan. More |
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SMIC to Expand With Two Fabs in Shenzhen
David Lammers, News Editor — Semiconductor International, 1/30/2008
Semiconductor Manufacturing International Corp. (SMIC, Shanghai) will launch a semiconductor manufacturing complex in Shenzhen in cooperation with the Shenzhen municipal government. More |
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Sumitomo Makes Takeover Bid for Axcelis
David Lammers, News Editor — Semiconductor International, 2/11/2008
Sumitomo Heavy Industries Ltd. (SHI, Tokyo) took the wraps off of an unsolicited takeover bid for Axcelis Technologies Inc. (Beverly, Mass). More |
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Roadmap Dictated by Flash, More Than Moore
Laura Peters, Lead Technical Editor — Semiconductor International, 1/25/2008
The 2007 edition of the International Technology Roadmap for Semiconductors (ITRS) projects the technology targets needed to continue to produce semiconductor devices cost-effectively through the year 2022. A significant new focus is the emphasis on More than Moore, the integration of various types of devices, as is deemed cost-effective, either on the same chip or in the same package. More |
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TI Pushes Junctions in 45 nm Transistors
David Lammers, News Editor — Semiconductor International, 2/7/2008
Texas Instruments Inc. (TI, Dallas) technology managers said improvements to junction engineering, supported by millisecond annealing techniques, play a key role in TI's 45 nm transistor technology, now winding its way toward mass production in the second half of this year. The biggest challenge was to control leakage while scaling the silicon oxynitride (SiON) gate dielectric by several angstroms and shortening the gate length. More |
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Heterogeneous Channels: A Goal of EC's 'Duallogic' Project
Staff — Semiconductor International, 2/11/2008
A European project to create dual-channel CMOS was announced, with the goal of combining germanium PMOS and III-V NMOS channels for post-22 nm CMOS. More |
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Stanford Researchers Demonstrate GHz-Speed CNT Interconnects
David Lammers, News Editor — Semiconductor International, 2/16/2008
Researchers at Stanford University (Palo Alto, Calif.) have developed a method of placing multi-walled carbon nanotubes as wires, with gigahertz-level interconnect performance observed for the first time. More |
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Green Chips: IC Makers Looking to Cash In
Peter Singer, Editor-in-Chief — Semiconductor International, 2/5/2008
The global explosion in information technology, combined with rapidly escalating energy costs, has chipmakers asking how much does it really cost to run today's computers, and what can be done to provide more energy-efficient solutions? More |
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Direct-Energy Plating: A New Electrodeposition Process for Interconnects
Steve T. Cho, Surfect Technologies, Tempe, Ariz. — Semiconductor International, 2/1/2008
A new process called direct-energy plating (DEP) uses vibrational energy that couples directly to the substrate. These energy modes do more than bring about simple agitation. The waveforms can be programmed to create multiple effects: surface cleaning, contact welding, enhanced diffusion through high-aspect-ratio structures, removal of bubbles or reduction of boundary layer for faster plating. More |
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Double Patterning: An Etch Perspective
Raghu Balasubramanian, Andy Romano and Marshall Benham, Lam Research Corp., Fremont, Calif. — Semiconductor International, 2/1/2008
Double patterning requires new critical etches capable of sub-1.5 nm CD uniformity, pattern shrink and in situ full-stack etching. More |
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On Mobility, Velocity Saturation and (110)
David Lammers, News Editor — Semiconductor International, 1/28/2008
In recent years, the chip industry has pulled a couple of rabbits out of the proverbial magician's hat: uniaxial strained silicon and immersion lithography. Will (110) CMOS be the next rabbit? Blog |
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Coat/Develop System
RF3T is a 200 wph coat/develop track system targeted for the full range of lithography applications. The system features additional parallel process modules and higher efficiency wafer transport.
Sokudo Co. Ltd., Kyoto, Japan
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Calibration Gas Generator
Dynacalibrator Model 150 is a constant temperature system designed to generate precise ppm or ppb concentrations of chemical compounds in a gas stream using permeation devices as the trace gas source.
VICI Metronics Inc., Poulsbo, Wash.
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Wafer-Level Vibration Sensor
WaferSense Auto Vibration System (AVS) was designed to monitor three-axis accelerations and equipment vibration to optimize equipment motion and wafer throughput.
CyberOptics Semiconductor, Beaverton, Ore.
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March 18-20, 2008: SEMICON China 2008
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