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Dear Subscriber,
December was rife with wafer processing news, including 45 and 32 nm
process details that emerged from the International Electron Devices
Meeting (IEDM), IBM's licensing of its 45 nm tech to China's
Semiconductor Manufacturing International Corp. (SMIC, Shanghai), and
a record-breaking 1 THz transistor produced by Northrop Grumman Corp.
(Redondo Beach, Calif.). Remember that you can always find other
useful information at our Wafer Processing Technology Channel:
www.semiconductor.net/wafer
Peter Singer, Editor-in-Chief
sieditor@aol.com |
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Pellerin Peers Down AMD Process
Options
David Lammers, News Editor — Semiconductor International,
12/18/2007
John Pellerin, director of logic technology development at Advanced
Micro Devices Inc. (AMD, Sunnyvale, Calif.), is sitting in one of the
industry's hot seats now, as the company seeks to get back on track
with the design and manufacturing synergies that served it so well in
2006. More |
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Intel Takes 45 nm High-k/Metal Gate
Process to IEDM
David Lammers, News Editor — Semiconductor International,
12/14/2007
Intel Corp. (Santa Clara, Calif.) provided some details of its 45 nm
high-k/metal gate process flow at the International Electron Devices
Meeting (IEDM) in Washington, D.C., although key elements of the pFET
electrode metal remained shrouded. More |
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IBM Licenses 45 nm Technology to
SMIC
Staff — Semiconductor International, 12/26/2007
IBM Corp. (Armonk, N.Y.) recently said that it has licensed its 45 nm
bulk CMOS technology to foundry Semiconductor Manufacturing International
Corp. (SMIC, Shanghai). More |
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1 THz InP Transistor Claims Speed
Record
Peter Singer, Editor-in-Chief — Semiconductor International,
12/21/2007
Northrop Grumman Corp. (Redondo Beach, Calif.) is claiming a new world
record for transistor speed with an indium phosphide-based
high-electron-mobility transistor (InP HEMT). The device has a maximum
frequency of operation of >1 THz (1000 GHz). More |
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IMEC Reports Progress on High-k/Metal
Gates
Laura Peters, Lead Technical Editor — Semiconductor International,
12/11/2007
At IEEE's International Electron Devices Meeting (IEDM), recently held
in Washington, D.C., IMEC (Leuven, Belgium) reported significant
progress in improving the performance of planar CMOS using
hafnium-based high-k dielectrics and tantalum carbide metal gates
targeting the 32 nm node. More |
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Toshiba Joins IBM Alliance for 32 nm
Bulk Process Development
David Lammers, News Editor — Semiconductor International,
12/18/2007
IBM Corp. (Armonk, N.Y.) and Toshiba Corp. (Tokyo) recently announced
that they have extended their relationship at the IBM-led process
development alliance, entering into a joint development agreement on
32 nm bulk CMOS process technology. The work will be conducted as part
of the now seven-company alliance, based in East Fishkill, N.Y. More |
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IBM Alliance Develops 32 nm High-
k/Metal Gate SRAM
David Lammers, News Editor — Semiconductor International,
12/9/2007
IBM Corp. (Armonk, N.Y.) said that it has developed a test SRAM array
using 32 nm high-k/metal gate process technology, an achievement that
puts IBM and its Fishkill alliance development partners on track to
introduce 32 nm technology in the second half of 2009. More |
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New Materials in Semiconductor
Fabrication: An Evolutionary Process
Ravi Kanjolia, SAFC Hitech, Haverhill, Mass. — Semiconductor
International, 12/1/2007
The search to identify suitable high-k and metal gate precursors for
ALD and CVD has led to a comparison of materials' properties and
features. For the 32 nm node, issues such as volatility, delivery
method and purity will be crucial. More |
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Flash Anneal Must Maintain Interface
Control
Laura Peters, Lead Technical Editor — Semiconductor International,
12/1/2007
The latest tool in the process engineer's toolbox, the flash anneal,
complements the spike rapid thermal annealing (RTA) methods already
used to provide dopant activation while limiting dopant diffusion.
However, the flash anneal is even more precise. More |
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450 mm: One Man's View
Peter Singer, Editor-in-Chief — Semiconductor International,
12/1/2007
Recently, our intrepid West Coast Editor Alex Braun sat down with Tom
Caulfield, executive vice president for sales, marketing and customer
service at Novellus (San Jose), to talk about 450 mm. More |
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AMEC Enters Etch, HPCVD Tool
Markets
Advanced Micro-Fabrication Equipment Inc.
(AMEC) unveiled the Primo
D-RIE (decoupled reactive ion etch) system for critical and other
dielectric etch applications and the Primo HPCVD (high-pressure
chemical vapor deposition) system for shallow trench isolation (STI)
and pre-metal dielectric (PMD) deposition.
More |
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Ultrathin-Wafer
Bonding
EV Group and Brewer Science demonstrated
temporary wafer bonding
capabilities for a wide range of backside processes, including
through-silicon vias (TSVs) and backside metallization. This latest
achievement further validates the viability of the companies' unique
approach, which is optimized for high-temperature advanced packaging
applications.
More |
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CVD System
Trias is a 300 mm, high-k CVD system
designed to produce the thin-film
materials required for advanced gate stacks. The single-wafer cluster
tool has a deposition chamber that is used to deposit hafnium-based
high-k dielectrics.
Tokyo Electron Ltd. (TEL), Tokyo
More |
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Jan. 13-16, 2008: Industry Strategy Symposium
2008
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Jan. 16-18, 2008: Strategic Materials Conference (SMC)
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Jan. 22, 2008: 2007 Edition of the ITRS
Webcast
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Jan. 22-24, 2008: Pan Pacific Microelectronics
Symposium 2008
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