Semiconductor International : Wafer Processing Report
December 28, 2007
IN THIS EDITION
NEWS
 
» Pellerin Peers Down AMD Process Options
» Intel Takes 45 nm High-k/Metal Gate Process to IEDM
» IBM Licenses 45 nm Technology to SMIC
» 1 THz InP Transistor Claims Speed Record
» IMEC Reports Progress on High-k/Metal Gates
» Toshiba Joins IBM Alliance for 32 nm Bulk Process Development
» IBM Alliance Develops 32 nm High-k/Metal Gate SRAM
EDITOR'S PICKS
 
» New Materials in Semiconductor Fabrication: An Evolutionary Process
» Flash Anneal Must Maintain Interface Control
» 450 mm: One Man's View
PRODUCTS
 
» AMEC Enters Etch, HPCVD Tool Markets
» Ultrathin-Wafer Bonding
» CVD System
UPCOMING EVENTS
 
Dear Subscriber,

December was rife with wafer processing news, including 45 and 32 nm process details that emerged from the International Electron Devices Meeting (IEDM), IBM's licensing of its 45 nm tech to China's Semiconductor Manufacturing International Corp. (SMIC, Shanghai), and a record-breaking
1 THz transistor produced by Northrop Grumman Corp. (Redondo Beach, Calif.). Remember that you can always find other useful information at our Wafer Processing Technology Channel:

www.semiconductor.net/wafer

Peter Singer, Editor-in-Chief
sieditor@aol.com

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NEWS

Pellerin Peers Down AMD Process Options
David Lammers, News Editor — Semiconductor International, 12/18/2007

John Pellerin, director of logic technology development at Advanced Micro Devices Inc. (AMD, Sunnyvale, Calif.), is sitting in one of the industry's hot seats now, as the company seeks to get back on track with the design and manufacturing synergies that served it so well in 2006. More

Intel Takes 45 nm High-k/Metal Gate Process to IEDM
David Lammers, News Editor — Semiconductor International, 12/14/2007

Intel Corp. (Santa Clara, Calif.) provided some details of its 45 nm high-k/metal gate process flow at the International Electron Devices Meeting (IEDM) in Washington, D.C., although key elements of the pFET electrode metal remained shrouded. More

IBM Licenses 45 nm Technology to SMIC
Staff — Semiconductor International, 12/26/2007

IBM Corp. (Armonk, N.Y.) recently said that it has licensed its 45 nm bulk CMOS technology to foundry Semiconductor Manufacturing International Corp. (SMIC, Shanghai). More

1 THz InP Transistor Claims Speed Record
Peter Singer, Editor-in-Chief — Semiconductor International, 12/21/2007

Northrop Grumman Corp. (Redondo Beach, Calif.) is claiming a new world record for transistor speed with an indium phosphide-based high-electron-mobility transistor (InP HEMT). The device has a maximum frequency of operation of >1 THz (1000 GHz). More

IMEC Reports Progress on High-k/Metal Gates
Laura Peters, Lead Technical Editor — Semiconductor International, 12/11/2007

At IEEE's International Electron Devices Meeting (IEDM), recently held in Washington, D.C., IMEC (Leuven, Belgium) reported significant progress in improving the performance of planar CMOS using hafnium-based high-k dielectrics and tantalum carbide metal gates targeting the 32 nm node. More

Toshiba Joins IBM Alliance for 32 nm Bulk Process Development
David Lammers, News Editor — Semiconductor International, 12/18/2007

IBM Corp. (Armonk, N.Y.) and Toshiba Corp. (Tokyo) recently announced that they have extended their relationship at the IBM-led process development alliance, entering into a joint development agreement on 32 nm bulk CMOS process technology. The work will be conducted as part of the now seven-company alliance, based in East Fishkill, N.Y. More

IBM Alliance Develops 32 nm High- k/Metal Gate SRAM
David Lammers, News Editor — Semiconductor International, 12/9/2007

IBM Corp. (Armonk, N.Y.) said that it has developed a test SRAM array using 32 nm high-k/metal gate process technology, an achievement that puts IBM and its Fishkill alliance development partners on track to introduce 32 nm technology in the second half of 2009. More

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EDITOR'S PICKS

New Materials in Semiconductor Fabrication: An Evolutionary Process
Ravi Kanjolia, SAFC Hitech, Haverhill, Mass. — Semiconductor International, 12/1/2007

The search to identify suitable high-k and metal gate precursors for ALD and CVD has led to a comparison of materials' properties and features. For the 32 nm node, issues such as volatility, delivery method and purity will be crucial. More

Flash Anneal Must Maintain Interface Control
Laura Peters, Lead Technical Editor — Semiconductor International, 12/1/2007

The latest tool in the process engineer's toolbox, the flash anneal, complements the spike rapid thermal annealing (RTA) methods already used to provide dopant activation while limiting dopant diffusion. However, the flash anneal is even more precise. More

450 mm: One Man's View
Peter Singer, Editor-in-Chief — Semiconductor International, 12/1/2007

Recently, our intrepid West Coast Editor Alex Braun sat down with Tom Caulfield, executive vice president for sales, marketing and customer service at Novellus (San Jose), to talk about 450 mm. More

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PRODUCTS

AMEC Enters Etch, HPCVD Tool Markets

Advanced Micro-Fabrication Equipment Inc. (AMEC) unveiled the Primo D-RIE (decoupled reactive ion etch) system for critical and other dielectric etch applications and the Primo HPCVD (high-pressure chemical vapor deposition) system for shallow trench isolation (STI) and pre-metal dielectric (PMD) deposition.
More

Ultrathin-Wafer Bonding

EV Group and Brewer Science demonstrated temporary wafer bonding capabilities for a wide range of backside processes, including through-silicon vias (TSVs) and backside metallization. This latest achievement further validates the viability of the companies' unique approach, which is optimized for high-temperature advanced packaging applications.
More

CVD System

Trias is a 300 mm, high-k CVD system designed to produce the thin-film materials required for advanced gate stacks. The single-wafer cluster tool has a deposition chamber that is used to deposit hafnium-based high-k dielectrics.
Tokyo Electron Ltd. (TEL), Tokyo
More

UPCOMING EVENTS

Jan. 13-16, 2008: Industry Strategy Symposium 2008

Jan. 16-18, 2008: Strategic Materials Conference (SMC)

Jan. 22, 2008: 2007 Edition of the ITRS Webcast

Jan. 22-24, 2008: Pan Pacific Microelectronics Symposium 2008

Copyright 2007 Reed Business Information, a division of Reed Elsevier Inc. All Rights Reserved.
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