Semiconductor International : Clean Processing Report
May 21, 2008
IN THIS EDITION
NEWS
 
» CNTs That Look Like Asbestos, Behave Like Asbestos
» Novellus Offers Dry Strip Tools for High-Volume Memory, Advanced Logic
» Haze, Still Misunderstood, Costing Industry $1B a Year
» FSI Ships Single-Wafer Cleaning for 32 nm Development
» Applied Tackles Edge With Inflexion Polishing System
» SEZ Group Now Lam's Spin Clean Division
» SEZ Reports Small Operating Loss for Fiscal 2007
» Mattson Receives Order for Suprema Strip System
EDITOR'S PICKS
 
» Applied Introduces Environmental Card Game for Children
» The Measure of All Things: IP Theft: Innovation at Risk
PRODUCTS
 
» Reticle Haze Detection
» Mobile Particle Counter
» Toxic Gas Detector
» TOC Sensor
UPCOMING EVENTS
 
Dear Subscriber,

I just got an e-mail from Applied Materials about their launch of a card game called Bright Future, designed to teach kids about sustainability and environmental concepts. As I pull together the cards to play with my 8-year-old daughter, my first thought is that it wouldn't be such a bad idea for fab managers and company CEOs to try their hand at the game. Check out the link to the game in Editor's Picks, and also check the News section for recent reports from the cleaning front. Remember that you can always keep up to date with the latest clean processing developments at our Clean Processing Technology Channel:

www.semiconductor.net/clean

Aaron Hand, Executive Editor, Electronic Media
ahand@reedbusiness.com

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NEWS

CNTs That Look Like Asbestos, Behave Like Asbestos
PR Newswire, 5/20/2008

A major study published in Nature Nanotechnology suggests some forms of carbon nanotubes (CNTs) could be as harmful as asbestos if inhaled in sufficient quantities. The study used established methods to see if specific types of nanotubes have the potential to cause mesothelioma — a cancer of the lung lining that can take 30-40 years to appear following exposure. The results show that long, thin multi-walled carbon CNTs that look like asbestos fibers, behave like asbestos fibers. More

Novellus Offers Dry Strip Tools for High-Volume Memory, Advanced Logic
David Lammers, News Editor — Semiconductor International, 5/19/2008

Novellus Systems announced two derivatives to its Gamma Express dry strip and clean platform: the G400, aimed at high-volume memory fabs; and the GxT, targeting the needs of advanced logic customers. The company developed a continuous RF capability that boosts throughput by continuing to ash even as wafers are moved from one station to the next. More

Haze, Still Misunderstood, Costing Industry $1B a Year
Aaron Hand, Executive Editor, Electronic Media — Semiconductor International, 5/7/2008

Arguably the single largest yield detractor in the semiconductor industry, costing the industry about a billion dollars every year, micro-contamination is still very little understood or acknowledged by semiconductor fabs. Industry experts discussed the issues and various solutions in a session earlier this month on time-dependent haze at ESTECH 2008. More

FSI Ships Single-Wafer Cleaning for 32 nm Development
Business Wire, 5/13/2008

FSI International Inc. announced that it shipped its single-wafer wet cleaning technology to a major semiconductor manufacturer for the development of back-end-of-line (BEOL) cleaning capability for 32 nm IC manufacturing. More

Applied Tackles Edge With Inflexion Polishing System
David Lammers, News Editor, and Laura Peters, Editor-in-Chief — Semiconductor International, 5/7/2008

Applied Materials introduced the Inflexion edge polishing system that has an integrated wafer cleaning capability. The Inflexion tool uses abrasive tape to clean the wafer's edge, an area that faces new contamination issues as immersion lithography pushes liquids to the edge of the wafer. More

SEZ Group Now Lam's Spin Clean Division
David Lammers, News Editor — Semiconductor International, 4/24/2008

Lam Research Corp. executives said that they have created a Spin Clean Division to attack high-throughput, single-wafer cleaning opportunities. The spin clean tools acquired from the former SEZ Group will complement Lam's linear clean tools, said Lam CEO Stephen Newberry. More

SEZ Reports Small Operating Loss for Fiscal 2007
Austria Today, 4/29/2008

The SEZ Group recently released its results for fiscal year 2007, reporting net sales of 205 million euros, 15.6% lower than in 2006. Order intake was down 26.3% to 186 million euros. More

Mattson Receives Order for Suprema Strip System
PR Newswire, 4/23/2008

Mattson Technology Inc. announced that it has received an order for the Suprema photoresist strip system from a leading Korean memory manufacturer. More

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EDITOR'S PICKS

Applied Introduces Environmental Card Game for Children
Applied Materials, 5/20/2008

Applied Materials announced the launch of its Bright Future card game, a tool for teaching sustainability and environmental concepts to children. Intended for ages 9 and up, the card game provides an interactive and easy-to-use aid for teachers to help students better understand how their actions can affect the planet. The game was developed in conjunction with two teachers as part of the Industry Initiatives for Science and Math Education (IISME) program. Check out the game

The Measure of All Things: IP Theft: Innovation at Risk
Alexander E. Braun, Senior Editor — Semiconductor International, 4/23/2008

SEMI recently released a white paper titled, "Intellectual Property Challenges and Concerns of the Semiconductor Equipment and Materials Industry," which the organization commissioned last year to get a better understanding of the problem of IP theft. Many countries, legal systems and cultures come into play in IP protection efforts, said Cymer CEO Bob Akins, "complicating the problem." Blog

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PRODUCTS

Reticle Haze Detection

Galileo is an early reticle haze detection system. It is a high-speed, high-resolution DUV transmission metrology tool that protects litho yields as a reticle requalification tool.
Pixer Technology Inc., San Jose
More

Mobile Particle Counter

Lasair III is a mobile particle counter designed with comprehensive software and a large, easy-to-use touchscreen.
Particle Measuring Systems, Boulder, Colo.
More

Toxic Gas Detector

The Guardian gas detection system uses economical, electrochemical sensor technology for detecting hazardous gas leaks at low concentrations, where byproducts can easily foul tubes, pipes and instruments.
Draeger Safety Inc., Sugar Land, Texas
More

TOC Sensor

The CheckPoint TOC portable/online sensor uses portability, fast analysis time and versatility to enable problem-solving and diagnostic capabilities at points of use away from power sources.
GE Analytical Instruments, Boulder, Colo.
More

UPCOMING EVENTS

June 1-5, 2008: Clean Technology 2008

July 15-17, 2008: SEMICON West

Copyright 2008 Reed Business Information, a division of Reed Elsevier Inc. All Rights Reserved.
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