The latest information on semiconductor lithography, including optical, EUV, e-beam, nanoimprint, maskless and other lithography techniques.
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Sematech Seeks EUV Mask Tool Funding
David Lammers, News Editor, June 30, 2009
Few commercial suppliers are stepping up to develop the EUV mask inspection tools that will be needed for 22 nm EUV patterning, said Bryan Rice, director of lithography at Sematech. The consortium is organizing a meeting at SEMICON West of government, consortia and private industry leaders to develop financial support for the EUV mask infrastructure. More
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Advanced Imaging Solutions for Shrinking the k1 Gap
SEMI, San Jose, June 25, 2009There's still room for improvement in optical lithography. At SEMICON West, Stephen Renwick of Nikon Precision Inc. will share his perspective on how much more the industry can get out of 193 nm optical litho, and — perhaps more important — what it will take to get there. More -
SEMICON West Session Focuses on 22 nm Lithography
SEMI, San Jose, June 25, 2009Moderated by Semiconductor International Executive Editor Aaron Hand, the "Lithography Challenges and Solutions" session at the Device Scaling TechXPOT at SEMICON West (located in North Hall at Moscone Center) will feature technologists from across the semiconductor supply chain. More -
Printable Electronics Hits Display Needs
Michael P.C. Watts, Impattern Solutions, Austin, Texas, June 24, 2009
Printable electronics could reduce the cost of making flexible displays of the kind used in the Kindle and other E-books. At the recent SID 2009 conference, researchers discussed the marriage of printable electronics and low-power displays used in emerging portable devices, which must be light, flexible, low-power, and readable in ambient light. More
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Applied, DNS Reshuffle Stakes in Sokudo
David Lammers, News Editor, June 23, 2009
Applied Materials and Dainippon Screen said they are adjusting ownership in the Sokudo track joint venture established in 2006. Applied will reduce its share of the JV to 19%, making Sokudo a subsidiary of DNS. Sokudo had losses of ~$122M in the fiscal year ending March 31, 2009. More
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EUV Reduced to an Engineering Problem
Laura Peters, Editor-in-Chief, June 9, 2009
EUV seems to be finally at the stage of "just an engineering problem," though a sufficiently powerful and reliable source has yet to be worked out. ASML's Martin van den Brink said his company plans to introduce a production EUV tool, capable of delivering 60 wph throughput, next year. More
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Rave Lands Rhazer at Chartered's Fab 7
Staff, June 9, 2009Rave LLC said its Rhazer haze removal technology has been evaluated by Chartered Semiconductor. The Singapore-based foundry has purchased the Rhazer tool to mitigate photomask haze at its 300 mm fab in Singapore. More -
Nikon to Reduce Lithography Workforce by 1000
Staff, May 27, 2009Facing “further severe business conditions,” Nikon Corp. said it will reorganize its lithography operations, cutting 800 production workers in Japan and 200 marketing and support staff worldwide. By October, Nikon plans to combine four production subsidiaries into two, focused on IC and display equipment. More
News from the Web
Collaboration Agreement to Speed Development of Leading-edge Imprint Masks Using Mask Replication Technology Based on J-FIL
Source: www.azonano.com
Date: 07-02-2009 00:46:50 GMTSUSS MicroTec Strengthens Presence in Asia with New Sales Structure
Source: www.suss.com
Date: 07-01-2009 19:39:50 GMTDai Nippon Printing and Molecular Imprints Team to Accelerate Commercialization of Nanoimprint Lithography
Source: news.prnewswire.com
Date: 07-01-2009 17:00:00 GMTDai Nippon Printing And Molecular Imprints Team To Accelerate Commercialization Of Nanoimprint Lithography
Source: www.semiconductoronline.com
Date: 07-01-2009 04:13:00 GMT3M and SUSS Announce Agreement on Temporary Wafer Bonding Technology to Enable 3-D Semiconductors
Source: www.Industrial-Embedded.com
Date: 06-22-2009 16:16:32 GMT
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News From Lexis Nexis
The Measure of All Things
May 20, 2009
A Jaunt Through Nanotechnopolis
I’ve just returned from Albany, New York, where I attended the 2009...
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Views on News
April 07, 2009
Whither Goest Sokudo?
Will Sokudo Co. Ltd. (Kyoto, Japan) continue to compete in the track business...
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The Measure of All Things
March 09, 2009
EUV Litho Needs Metrology Support
Without doubt, metrology is becoming increasingly more important as the industry...
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The Fine Print
February 24, 2009
Innovating Through the Quagmire
I rushed into the plenaries this morning at 2 minutes to 8, sure that...
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first 157 nm, then high-index...
guess who's next– 7/4/2009 12:54:59 PM CDT
in response to Sematech Seeks EUV Mask Tool FundingThe memory makers are already using double patterning below 40 nm half-pitch....
memory maker– 7/1/2009 4:48:28 AM CDT
in response to Sematech Seeks EUV Mask Tool FundingContinued EUV support is very poorly justified. To be frank, from what I have...
not liking what I see– 7/1/2009 1:39:49 AM CDT
in response to Sematech Seeks EUV Mask Tool FundingI think that there's still long way to go before Sokudo can regain profit. Apply...
Adam Chuang– 6/23/2009 8:54:51 PM CDT
in response to Applied, DNS Reshuffle Stakes in Sokudo
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Technical Articles
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EUV Requires Enhanced Metrology
Alexander E. Braun, Senior Editor 04/01/09This month's podcast spotlights Kurt Ronse, director of the Advanced Lithography Program at IMEC (Leuven, Belgium), who discusses the work in progress on extreme ultraviolet (EUV) lithography. -
Complementary Techniques Identify OPC Hotspots
Andre Poock, Sarah McGowan and Francois Weisbuch, AMD Saxony LLC & Co. KG, Dresden, Germany; Guido Schnasse and Rajesh Ghaskadvi, KLA-Tencor Corp., San Jose 04/01/09Lithography hotspots induced by optical proximity correction (OPC) can be identified using optical rule check (ORC) and process window qualification (PWQ). These complementary techniques ensure that a new OPC model is working correctly, helping to prevent the formation of systematic defects during production. -
EDA Considers 22 nm and Looks Beyond
Alexander E. Braun, Senior Editor 03/01/09In this month's Movers & Shakers interview, Joseph Sawicki, vice president and general manager for Mentor Graphics' Design-to-Silicon Division, speaks about the technology challenges that EDA designers face.
Events
BrightSpots 3D IC Forum
Dates: 07-24, 2009Location:2009 International Workshop on EUV Lithography
Dates: 07-17, 2009Location: Sheraton Waikiki, HonoluluTopical Workshop on Wire Bonding
Dates: 07-13, 2009Location: San Francisco, Calif.




