Log In   |  Register Free Newsletter Subscription
Skip navigation
Zibb
Subscribe to Semiconductor International

Lithography

RSS

The latest information on semiconductor lithography, including optical, EUV, e-beam, nanoimprint, maskless and other lithography techniques.

  • Sematech Seeks EUV Mask Tool Funding

    David Lammers, News Editor, June 30, 2009
    EUV Lithography Few commercial suppliers are stepping up to develop the EUV mask inspection tools that will be needed for 22 nm EUV patterning, said Bryan Rice, director of lithography at Sematech. The consortium is organizing a meeting at SEMICON West of government, consortia and private industry leaders to develop financial support for the EUV mask infrastructure.  More
  • Advanced Imaging Solutions for Shrinking the k1 Gap

    SEMI, San Jose, June 25, 2009
    There's still room for improvement in optical lithography. At SEMICON West, Stephen Renwick of Nikon Precision Inc. will share his perspective on how much more the industry can get out of 193 nm optical litho, and — perhaps more important — what it will take to get there.  More
  • SEMICON West Session Focuses on 22 nm Lithography

    SEMI, San Jose, June 25, 2009
    Moderated by Semiconductor International Executive Editor Aaron Hand, the "Lithography Challenges and Solutions" session at the Device Scaling TechXPOT at SEMICON West (located in North Hall at Moscone Center) will feature technologists from across the semiconductor supply chain.  More
  • Printable Electronics Hits Display Needs

    Michael P.C. Watts, Impattern Solutions, Austin, Texas, June 24, 2009
    DuPont Displays Printable electronics could reduce the cost of making flexible displays of the kind used in the Kindle and other E-books. At the recent SID 2009 conference, researchers discussed the marriage of printable electronics and low-power displays used in emerging portable devices, which must be light, flexible, low-power, and readable in ambient light.  More
  • Applied, DNS Reshuffle Stakes in Sokudo

    David Lammers, News Editor, June 23, 2009
    Sokudo Duo Applied Materials and Dainippon Screen said they are adjusting ownership in the Sokudo track joint venture established in 2006. Applied will reduce its share of the JV to 19%, making Sokudo a subsidiary of DNS. Sokudo had losses of ~$122M in the fiscal year ending March 31, 2009.  More
  • EUV Reduced to an Engineering Problem

    Laura Peters, Editor-in-Chief, June 9, 2009
    Overlay requirements 330 EUV seems to be finally at the stage of "just an engineering problem," though a sufficiently powerful and reliable source has yet to be worked out. ASML's Martin van den Brink said his company plans to introduce a production EUV tool, capable of delivering 60 wph throughput, next year.  More
  • Rave Lands Rhazer at Chartered's Fab 7

    Staff, June 9, 2009
    Rave LLC said its Rhazer haze removal technology has been evaluated by Chartered Semiconductor. The Singapore-based foundry has purchased the Rhazer tool to mitigate photomask haze at its 300 mm fab in Singapore.  More
  • Nikon to Reduce Lithography Workforce by 1000

    Staff, May 27, 2009
    Facing “further severe business conditions,” Nikon Corp. said it will reorganize its lithography operations, cutting 800 production workers in Japan and 200 marketing and support staff worldwide. By October, Nikon plans to combine four production subsidiaries into two, focused on IC and display equipment.  More

Next ›

News from the Web

Advertisement
Reed Business Information Resource Center

Featured Company


Most Recent Resources

Sponsored Links

  • Blogs

  • Talkback

  • Podcast

  • Video


Alex Braun

The Measure of All Things

Alexander E. Braun, Senior Editor, Semiconductor International
May 20, 2009
A Jaunt Through Nanotechnopolis
I’ve just returned from Albany, New York, where I attended the 2009...
More

David Lammers

Views on News

David Lammers, News Editor, Semiconductor International
April 07, 2009
Whither Goest Sokudo?
Will Sokudo Co. Ltd. (Kyoto, Japan) continue to compete in the track business...
More

Alex Braun

The Measure of All Things

Alexander E. Braun, Senior Editor, Semiconductor International
March 09, 2009
EUV Litho Needs Metrology Support
Without doubt, metrology is becoming increasingly more important as the industry...
More

Aaron Hand

The Fine Print

Aaron Hand, Executive Editor, Electronic Media
February 24, 2009
Innovating Through the Quagmire
  I rushed into the plenaries this morning at 2 minutes to 8, sure that...
More

» VIEW ALL BLOGS RSS
  • Sorry, no podcasts are active for this topic

Sorry, no videos are available for this series.

  More Videos>>
NEWSLETTERS
SI NewsBreak and Special Reports
Photovoltaics Report
Wafer Processing Report
Litho & Metrology Report
Packaging Report



Please read our Privacy Policy


Technical Articles

  • EUV Requires Enhanced Metrology

    Alexander E. Braun, Senior Editor 04/01/09
    This month's podcast spotlights Kurt Ronse, director of the Advanced Lithography Program at IMEC (Leuven, Belgium), who discusses the work in progress on extreme ultraviolet (EUV) lithography.
  • Complementary Techniques Identify OPC Hotspots

    Andre Poock, Sarah McGowan and Francois Weisbuch, AMD Saxony LLC & Co. KG, Dresden, Germany; Guido Schnasse and Rajesh Ghaskadvi, KLA-Tencor Corp., San Jose 04/01/09
    Lithography hotspots induced by optical proximity correction (OPC) can be identified using optical rule check (ORC) and process window qualification (PWQ). These complementary techniques ensure that a new OPC model is working correctly, helping to prevent the formation of systematic defects during production.
  • EDA Considers 22 nm and Looks Beyond

    Alexander E. Braun, Senior Editor 03/01/09
    In this month's Movers & Shakers interview, Joseph Sawicki, vice president and general manager for Mentor Graphics' Design-to-Silicon Division, speaks about the technology challenges that EDA designers face.

Events

Advertisement
OTHER NEWS FROM RBI
About Us   |   Advertising Info   |   Site Map   |   Contact Us   |   FREE Subscription   |   RSS
© 2009 Reed Business Information, a division of Reed Elsevier Inc. All rights reserved.
Use of this Web site is subject to its Terms of Use | Privacy Policy
Please visit these other Reed Business sites