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SEMICON West '07: Just Clean Enough – New Yield Mantra
July 18, 2007
After years of driving specifications for particles and other contamination to smaller and smaller dimensions, the industry is getting to a new level: If we can't measure it, we don't know if it's there. Somewhere around 40 nm, we can no longer detect defects, so rather than ask for better and better specifications from gases, chemicals and on wafers, we need to control the processes better. This is the gist of the new ITRS Yield session, which is being updated at the show today and will be revealed towards the end of this year. Big (or small) things may be in store.
Posted by Laura Peters on July 18, 2007 | Comments (0)
