Axcelis Technologies, Sumitomo Heavy Industries and TPG Capital Enter Into Confidentiality Agreement

BEVERLY, Mass., June 6, 2008 (PRIME NEWSWIRE) -- Axcelis Technologies, Inc. (Nasdaq:ACLS) reported today that it, Sumitomo Heavy Industries Ltd. (SHI) (TSE:6302) and TPG Capital have entered into a confidentiality agreement with respect to discussions between the parties and the confidentiality of information to be provided by Axcelis to SHI and TPG. The parties intend to commence these discussions promptly. There can be no assurance that these discussions will result in any transaction.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation and cleaning systems. Axcelis also licenses its 50% owned joint venture, SEN Corporation, an SHI and Axcelis Company, to manufacture and sell certain implant products in Japan. The company's Internet address is: www.axcelis.com.

Forward-Looking Statements

The statement in this press release regarding the parties' intentions to commence discussions is a "forward-looking statement" which expresses the current expectations of Axcelis management. We wish to caution you not to place undue reliance on these expectations. The Company undertakes no obligation to update publicly any forward-looking statements, whether as a result of new information, future events or otherwise. Other risk factors relating to Axcelis are described more fully in the most recent Form 10-K filed by Axcelis and in other filings from time to time with the Securities and Exchange Commission.