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SEM/TEM of the Month

-- Semiconductor International, 5/1/2001

This image, from Motorola's Semiconductor Products Sector (Austin, Texas), is a top down/angle SEM of corrosion of an AlCuSi metal layer. Through further analysis (SAM), the corrosion revealed itself as Cl due to moisture from a leak in an etch chamber and residual etchant.

Please send submissions for SEM/TEM of the month to Peter Singer, Editor-in-Chief, 58 Summer St., Andover, MA 01810 USA.


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