Liquid Contamination Filters
-- Semiconductor International, 7/1/2008
The Torrento family of high-flow liquid filters help improve liquid contamination control of nanoscale particles in wet etch and clean manufacturing processes. 20 nm filters use a specialized non-dewetting Teflon membrane technology that attracts the contaminating particles rather than just sieving them. The filters also have a larger surface area than general use filters due to an advanced ATE device construction technology. Entegris Inc., Chaska, Minn., www.entegris.com
