Turbomolecular Vacuum Pump
-- Semiconductor International, 7/1/2008
The iXA is a series of magnetic bearing turbomolecular vacuum pumps. They pump exhaust process gases from PVD, etching, CVD, etc., and feature power supply and control modules that can be mounted in various configurations directly on the pumps or remotely. This eliminates cables and accessory racks while still preserving the flexibility to fit a wide range of equipment. Edwards, Wilmington, Mass., www.edwardsvacuum.com
