Turbopumps
-- Semiconductor International, 5/1/2008
HiPace is a line of turbopumps available in speeds that range from 10 to 700 L/sec. The line features an enhanced rotor design that reduces run-up time and provides high gas throughput and compression for light gases. Integrated drive electronics reduce bulky and costly cabling. The turbopumps can be installed in any orientation and are available in corrosive-gas versions. Pfeiffer Vacuum, Nashua, N.H., www.pfeiffer-vacuum.com
