Fab Automation Gets Boost From Interface A
Aaron Hand, Managing Editor -- Semiconductor International, 6/15/2006
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Last year at SEMICON West, the Esplanade Hall at Moscone Center was the Emerging Technology hall, but also included manufacturing and design automation. This year, it will be called the Manufacturing Productivity and Effectiveness hall. "The big areas it covers are e-manufacturing, electronic design automation, and other productivity improvements," said John Ellis, senior director of technology and standards at SEMI. "E-manufacturing includes things like automatic process control, automatic equipment control, e-diagnostics, and the suite of standards that includes Interface A. That allows connectivity much better than our old SECS/GEM standard."
Along with the technical advances of the semiconductor manufacturing processes themselves, factory productivity and efficient manufacturing control are key to a fab's success. In fact, that success increasingly relies on the collection and analysis of growing amounts of detailed process, measurement and operational data from the equipment to improve yield, efficiency, productivity and more. As processes become more complex, it becomes more important to use the data to reduce process variation, minimize the impact of excursions, and improve overall equipment effectiveness.
The SEMI-created Interface A has generated quite a buzz lately in fab automation. It is a relatively new suite of equipment data acquisition (EDA) standards that take advantage of open standards, such as XML web services, to provide fabs with more complete and useful data for key process, metrology, operational and other applications.
Although Interface A offers improved data ports over SECS/GEM, it does not replace the SECS/GEM or 300 mm standards, which pertain to equipment control and configuration. It is also distinct from Interface B, which facilitates data sharing between applications, and Interface C, which provides remote access to equipment data.1 Industry adoption of Interface A has been gaining momentum, but more needs to be done to fully implement the standard across the industry.
Last year at an e-manufacturing workshop sponsored by the International Sematech Manufacturing Initiative (ISMI), IBM's Perry Hartswick noted his company's continued yield learning requirements, including increased data availability and accessibility, consistent data integrity, increased data granularity, and consistent timeliness of data. With preparation for the standard underway, he expected Interface A to enable a shorter time to integrate a tool into the factory, done through the use of equipment self-description. Process control function continues to increase, he noted, but more and finer grained process data was required, and time stamping and ordering of events and data needed to be improved (not only for Interface A).
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