Company News
-- Semiconductor International, 2/1/2001
Air Products and Chemicals Inc. (Lehigh Valley, Pa.) and Quantum Global Technologie LLC (Dublin, Pa.) have joined forces to provide multiple new regional, semiconductor tool parts cleaning services. The facilities are scheduled to start up throughout the year. The companies also plan to jointly provide equipment parts cleaning services in centralized Asian and European semiconductor manufacturing locations.Dainippon Screen Manufacturing Co. Ltd. (Kyoto, Japan) and Ashland Specialty Chemical Co. (Dublin, Ohio) have partnered to promote chemistries for polymer cleaning in single-wafer processing tools. The alliance will exist for at least one year and address the trend in polymer removal processes.
Cabot Microelectronics Corp. (Geino, Japan) will double its manufacturing capacity at its Oaza-Kitakoyama Industrial Park facility. This 73,000 ft2 addition is
scheduled for completion in July.
Matheson Tri-Gas Inc. (San Jose) introduced a new purification compound, NANOCHEM MetalX corrosive gas purification medium. It prevents the corrosion of gas delivery equipment and removes volatile metal impurities that pass through 0.003 µm particle filters. Applications include high- and low-temperature Si Epi, GaN etch, polysilicon, fiber optics and compound semiconductor manufacturing.