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-- Semiconductor International, 11/1/2000
New Software Tracks Equipment Performance
Chipmakers now have access to a software tool that will enable them to automatically collect performance data on operations and equipment in fabs. The software, called TP2 for Tool Performance Tracking Platform, is being licensed by International SEMATECH. The software was demonstrated on some 400 tools covering 24 models within the fabs of 13 member companies.Among the semiconductor wafer fab metrics currently being tracked:
- Productive time
- Standby time
- Unscheduled downtime (alarm triggered)
- Interruption time that occurs during productive time
- The number of interruptions
- The number of cycles or wafers
- Process recipe-step duration
- In situ chamber clean time
- Wafer processing time by wafer ID, by recipe, by lot and by chamber
- Average wafer processing time by recipe, by lot and by chamber
The implementations are based on the SEMI E10 (Standards for Definition and Measurement of Equipment Reliability, Availability, and Maintainability). Additionally, the TP2-generated data can be used as input to OEE (Overall Equipment Efficiency) calculations.
The TP2 software, developed by International SEMATECH, is a Java-based application that uses information extracted from semiconductor equipment SECS (Semiconductor Equipment Communication Standard) event messages. TP2 uses this information to collect and calculate in real time equipment performance and operations measurements automatically.
If you are interested in licensing the TP2 software from International SEMATECH, contact Kathy Lorenzi (1-512-356-3115, kathy.lorenzi@sematech.org) or Nick Chremos (1-512-356-7581, nick.chremos@sematech.org) for a licensing packet.
