Microchip Fabrication

-- Semiconductor International, 7/1/2000

When Microchip Fabrication, A Practical Guide to Semiconductor Fabrication first appeared back in 1984, nobody, least of all the author, imagined this book still would be in print almost two decades later. This is the fourth edition of a truly seminal work that can be justly described as one of the best introductions to what the semiconductor industry is and does. Referred to as a novice-friendly guide to the A to Z of semiconductor production, it also can be used by the professional searching for a quick refresher. Van Zant uses a math-free approach to skillfully cover practically all aspects of fabrication, as well as touching upon testing, packaging, the various types of commercial ICs and other basics.

The book opens with "The Semiconductor Industry," a short but complete history of the semiconductor industry from its earliest beginnings to the Nano Era, with a lively discussion of the various trends and technologies that have shaped - and are shaping - our industry. Other chapters range from "Semiconductor Materials and Process Chemicals" to "Contamination Control" and "Advanced Photolithography Processes." This edition has been revised to include comprehensive sections on packaging, copper metalization, damascene patterning and other technologies. A comprehensive glossary defining the terms used throughout the book also is included.

Although this is a cornerstone reference work that belongs on the bookshelf of anyone who is interested in or works with semiconductor technology, it is marred by carelessness on the part of the McGraw-Hill editorial staff. In the section dealing with the dual-damascene process, for example, tungsten is misspelled in no fewer than two places. However, although this can be jarring to the reader, it does not detract from the overall value of the work's content.