SEM/TEM of the Month
Staff -- Semiconductor International, 2/1/2003
This SEM image was taken by Chi-Fung Lo, a senior R&D engineer at Praxair Electronics (Orangeburg, N.Y.). Titled "Ocean Waves," it was obtained from a fracture surface of a 1-mm-thick titanium nitride layer deposited by a physical vapor deposition (PVD) process. The thick TiN layer was composed of multiple TiN films of ~125 nm.
Please send submissions for SEM/TEM of theMonth to Peter
Singer, Editor-in-Chief, 58Summer St., Andover, MA 01810 USA.
E-mail: sieditor@aol.com .
