SEM/TEM of the Month
Staff -- Semiconductor International, 1/1/2003
This SEM image was taken by Chi-Fung Lo, a senior R&D engineer at Praxair Electronics (Orangeburg, N.Y.). Titled “Ocean Waves,” it was
obtained from a fracture surface of a 1-mm-thick titanium nitride layer
deposited by a PVD process. The thick TiN layer was composed of multiple TiN
films of ~125 nm.
Please send submissions for SEM/TEM of the Month to Peter Singer, Editor-in-Chief, 58 Summer St., Andover, MA 01810 USA.
