Mattson Teams with Sandia on RTP Development
-- Semiconductor International, 11/1/1998
Mattson Technology (Fremont, Calif.) has established a
strategic relationship with Sandia National Laboratories to license Sandia
advanced technology for its Aspen RTP system. The agreement resulted from a
preliminary Joint Development Project that extended over the past 12 months,
along with a concurrent global Joint Development Program. The technology license
applies to 200 and 300 mm manufacturing. 
