SiGe Draws Collaboration
-- Semiconductor International, 5/1/1999
Applied
Materials Inc. (Santa Clara, Calif.) is working with Epitronics Corp. (Mesa,
Ariz.) to provide a qualified facility in Mesa for demonstrating and developing
SiGe epitaxial processes on Applied's Epi Centura system.
As part of the collaboration, chipmakers can use the Applied systems at
Epitronics' facility for process demonstration and development under the
guidance of the two companies' personnel. The goal of this 'virtual fab' is to
provide cost-effective, enhanced service and information to both companies and
their customers. For smaller chipmakers who cannot support an internal epi
facility, the cooperative arrangement lets them access SiGe epi technology using
the latest process equipment. Epitronics also will use the Applied system to
manufacture SiGe epi wafers for customers.