Addendum

-- Semiconductor International, 10/1/1999

In the July article 'Advanced Process Control: Soon to be a Must,' Semy Engineering's activities in advanced process control were unfortunately not included. The company provides equipment supervisor workstations, whose capabilities include process parameter data storage and secure recipe management, and fab supervisor workstations for fab-wide data collection, anaysis and control. The company's preventive maintenance and statistical machine control applications combine to provide automatic, predictive fault detection. Their advanced run-to-run control application uses metrology data to automatically make feedback and feedforward adjustments to user selected recipe parameters.

For more information directly from Semy Engineering, visit the company's Web site, www.semy.com, or SI's Web site at www.semiconductor.net.