Clarification
-- Semiconductor International, 8/1/1999
Mr.
Jean-Claude Fouéré, vice president and general manager for SOPRA Inc. (Acton,
Mass.), requested the following clarification of his statement on page 82 of the
article, 'Thin-Film Measurement Takes on New Materials, Limitations,' published
in SI's June issue: 'My comment on measurement precision and accuracy was
a reflection on how functional chips can be produced day in, day out with what
seems at times a poor grasp and understanding of the accuracy on thin film
measurements. I did not mean to imply that measurement accuracy is not
important.'