Network-Based System Controls Tools

-- Semiconductor International, 8/1/1999

The first network-based integrated motion and machine control system, specifically designed for automated process tools has been introduced by Berkeley Process Control Inc. (Richmond, Calif.). The BXi controller has eight internally powered servo axes, an expandable 100 Mbit Ethernet I/O system and an object-based development environment, and is driven by a RISC-based processor core.

The system can control almost all servo motor-driven wafer handling equipment, such as multi-axis robots, notch-aligners and pod door openers. Because it resides on an Ethernet network, machine data down to the sensor level can be accessed through the corporate intranet or anywhere in the world via the Internet. This eliminates considerable wiring and integration efforts. Since software ultimately ties all these control elements together, the system provides more software re-use. The BXi unit measures about 10' x 3' x 8', and does not require point-to-point wiring, a control panel or low-level software to be written.

The system's autocalibration capability eliminates robot teaching and robot replacement times. Using a variety of application-specific methods, it allows a robot to precisely locate tool points without the need for operator assistance, reducing training from several hours to minutes.