Motorola to Cut PFC &nEmissions in Half

Staff -- Semiconductor International, 6/1/1999

Motorola's Semiconductor Products Sector (SPS, Austin, Texas) announced that it will aggressively reduce emissions of perfluorocompounds (PFCs) at all of its manufacturing facilities to a level well beyond current industry standards. The company plans to achieve a 50% absolute emission reduction by 2010, compared with 1995 emissions that have been defined as the industry's standard baseline.

Compared with the average industry reduction goals announced in the past year, Motorola's plans call for an absolute reduction that is not tied to production levels. Motorola's PFC emissions will be reduced despite anticipated growth in production levels over time.

Motorola has been a major developer and evaluator of state-of-the-art PFC emissions-reduction technology for the past five years: This includes a recent collaboration with Applied Materials (Santa Clara, Calif.) on its Remote Clean technology, which is expected to reduce PFC emissions from chemical vapor deposition (CVD) manufacturing processes by 99%.