Semitool and IMEC to Work On Cleaning Technology
-- Semiconductor International, 3/1/1999
Semitool Inc.(Kalispell, Mont.) and IMEC (Leuven, Belgium)
have signed a collaboration agreement on ozonated water processes for advanced
cleaning applications. The focus is on enhancing Semitool's HydrOzone ozonated
water process for advanced cleaning applications through development of new
technology and implementation of IMEC's ozone-based cleaning technology. Typical
applications are removal of organic contaminants and photoresist stripping.
