Isonics Introduces Isotopically Pure Silicon-28 Epitaxial Wafer

Staff -- Semiconductor International, 3/1/1998

Isonics Corp. (San Jose, Calif.) introduced an isotopically pure silicon-28 wafer. The company said it believes that the improved thermal characteristics of the wafers will facilitate the manufacture of higher density integrated circuits resulting in increased performance, improved chip yields and shorter time-to-market for new designs. While having better thermal properties than standard silicon, the isotopically pure silicon requires no change in semiconductor manufacturing processes.

According to the company, tests have shown that isotopically pure silicon-28 has >50% better thermal conductivity than natural silicon. The wafers are grown as an epitaxial layer on a standard silicon single-crystal wafer.

Isonics President and CEO James E. Alexander said, "We believe there are substantial benefits for current applications, but we also expect that the properties of our improved silicon will become critically important as the industry transitions to 300 mm wafers, copper interconnects and 0.18 µm (180 nm) design rules."