New Hydrogen Purification Technology Developed
Staff -- Semiconductor International, 8/1/1998
New Hydrogen Purification Technology Developed
Johnson Matthey (Wayne, Pa.) and Air Products and Chemicals (Lehigh Valley,
Pa.) have developed a new palladium membrane diffusion technology to produce
ultra-high purity hydrogen. The technology is designed to eliminate carbon monoxide
(CO), carbon dioxide (CO2) and methane (CH4) contamination
in hydrogen. The two companies have filed for a joint patent on the technology
that will initially be used by Air Products in major semiconductor manufacturing
projects in the Pacific Rim.
In experiments performed by Air Products, it was found that CO and CO2 was passing through the palladium diffusion membrane and reacting with hydrogen on the other side to produce CH4. The two companies then developed a technology employing a methanation catalyst that converts the CO and CO2 to CH4, allowing the palladium membrane to separate the CH4 from the hydrogen.
According to Daniel M. Buck, Air Products' semiconductor market segment manager, the new technology will facilitate the use of ultra-high purity hydrogen in locations where commercially available hydrogen sources contain relatively high levels of contaminants. "The technology will allow our customers to deliver the same ultra-high purity hydrogen quality to any of their facilities worldwide," Buck said.
