SEMICON Southwest Showcases Regional Technology
Maria A. Lester, Associate Editor -- Semiconductor International, 9/15/2001
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For the fifth consecutive year, Austin, Texas hosts SEMICON Southwest at the Austin Convention Center. The programs, events and standards meetings will take place Oct. 14-17, with exhibition days Oct. 16-17. Exhibition hours are 10 a.m.-6 p.m. Oct. 16 and 10 a.m.-5 p.m. Oct. 17.
SEMICON Southwest features four days of programs and standards meetings Oct. 14-17 (Table). Among the returning programs are the Standards Technical Education Programs (STEP), which include Measurement and Management of Equipment RAM and Equipment Productivity, and 300 mm Wafer ID Mark. Also returning is the popular Semiconductor Processing Technology, an introductory, three-day course focusing on the basics and case studies of actual problems caused by equipment and materials issues.
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| Programs will be held at the Austin Convention Center. (Source: Austin Convention and Visitors Bureau) |
Among the STS programs offered is A Partnership for PFC Emissions Reductions Workshop, co-sponsored with SIA, SESHA and International SEMATECH. It will be held 9 a.m.-6 p.m. Oct. 15. Current innovative technologies such as new alternative gas technologies, process optimization studies and abatement methods will be presented. Regulatory and implementation issues also will be discussed.
| Sunday, Oct. 14 | |
| 8 a.m.-5 p.m. | Semiconductor Processing Technology (day 1/3) |
| Monday, Oct. 15 | |
| 8 a.m.-5 p.m. | Semiconductor Processing Technology (day 2/3) |
| 9 a.m.-5 p.m. | MEMS/MST Technology: The Second Micro-manufacturing Revolution |
| 9 a.m.-6 p.m. | A Partnership for PFC Emissions Reductions Workshop |
| 1-4:30 p.m. | STEP: SEMI E10 and E79 — Measurement and Management of Equipment Reliability, Availability and Maintainability (RAM) and Equipment Productivity |
| 1-4:30 p.m. | Workshop (related to SEMI E10/E79 STEP): Development of Metrics for the Measurement and Management of FAA Level Productivity |
| 1-5 p.m. | STEP: Practical Experience with SEMI F47 Voltage Sag Immunity |
| Tuesday, Oct. 16 | |
| 8 a.m.-noon | STEP: SEMI E89-Analysis of Gauge Measurement Capability |
| 8 a.m.-5 p.m. | Semiconductor Processing Technology (day 3/3) |
| 3-5 p.m. | Chemicals and Gases Manufacturing Group (CCMG) General Meeting |
| Wednesday, Oct. 17 | |
| 9 a.m.-5 p.m. | Critical Technologies Conference: Gate Stack Engineering |
| 1-5 p.m. | STEP: 300 mm Wafer ID Mark — Requirements and Challenges |
| (Source: SEMI) | This table is accurate as of Aug. 9. |
About 150 SEMI standards meetings are scheduled during SEMICON Southwest. The program provides a forum to exchange information to produce technically accurate industry specifications and standards. A wide range of standards, from equipment automation to specialty gases, is covered. Meetings are open to all at no charge.
For more information, visit www.semi.org.
