SEMATECH, Planergy Complete Energy Study

Staff -- Semiconductor International, 2/1/1998

Industry News

SEMATECH, Planergy Complete Energy Study

SEMATECH (Austin, Texas) and Planergy (Austin, Texas) completed the pilot phase of a groundbreaking pilot study on energy usage patterns in semiconductor fabrication facilities. The study identified the potential for energy efficiency measures that can result in immediate cost savings with no impact on production.

The study is the first phase of an energy audit program developed by SEMATECH and Planergy. AMD's Fab 25 in Austin and a National Semiconductor Corp. facility in Arlington, Texas, participated in the study. A key objective of the study was to create a replicable template for conducting comprehensive energy efficiency studies in operating fabs.

The energy assessments included the manufacturing area (the cleanroom), support areas (such as ultrapure water production) and office space. Unlike other energy assessments, this study included significant, in-depth monitoring of individual and aggregate loads, including actual measurement of individual manufacturing equipment. The methodology and tools used in the assessment could be applied to any manufacturing environment with strict temperature, humidity and particulate requirements.

The project is a first for the industry for many reasons. Participants are measuring actual energy use and providing feedback to equipment suppliers on how equipment designs impact a manufacturing facility's installation infrastructure and operating conditions in the field. This means that in addition to finding efficiency measures to be taken advantage of today, the goal is to improve future equipment design and construction.

"A key element of this study is that it proves that effective measurement tools can be employed in an industrial manufacturing setting without interrupting -- in any way -- production in the plant," said Richard Patton, vice president of engineering for Planergy. "In fact, all recommendations made by this study are made on the assumption that conditions in the fab cannot be altered."

AMD's Fab 25 was the first facility surveyed. The manufacturing equipment assessment included a total of 150 process tools and more than 120 sample points. Energy consumption was measured on at least one representative tool from each process step, both during times of constant and variable loading. Energy consumption of support facilities and equipment associated with the fab, such as ultrapure water operations, nitrogen plant, air compressors, chillers, airflow and exhaust and HVAC, were also spot metered and/or trended. Data from existing controls and monitoring systems were also collected. The end result was a comprehensive snapshot of energy use in a fab.

Planergy proposed modifications to Fab 25's HVAC, lighting, compressed air and tool support that could yield a total annual energy savings of $579,615 with an implementation cost of $252,500. These cost savings were calculated using a standard cost of $.05 per kilowatt and $3 per million cubic feet of natural gas.

"We certainly achieved our goals in participating in this pilot study, and the team from AMD, SEMATECH and Planergy accomplished this effectively," said David Bennett, AMD's technology transfer manager. "Our goals were to baseline our energy use, identify opportunities for energy reduction and savings and apply this learning forward into a future fab currently under construction."

Based on an initial report National Semiconductor received from Planergy, the company could save up to $700,000 a year based on a $2 million implementation. "National Semiconductor is concerned about the environment and about being efficient with our energy use," said Al Wright, facilities manager. "We're currently working with Planergy on a cost analysis to decide which recommendations we will be implementing." PS

Semiconductor International / February 1998