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Staff -- Semiconductor International, 9/1/2001

EBARA Technologies Inc. (Sacramento, Calif.) completed its new CMP Sacramento training facility. The first CMP tool was delivered in April.

International SEMATECH (Austin, Texas) has contracted with Optical Research Associates (ORA, Pasadena, Calif.) to extend the capabilities of its CODE V optical design software to support analysis of advanced optical systems for 157 nm microlithography. This will involve the development of algorithms for the modeling of birefringent crystalline materials.

Credence Systems Corp. (Fremont, Calif.) completed its acquisition of Integrated Measurements Systems Inc. (IMS, Beaverton, Ore.) for ~$155M in a stock-for-stock transaction. Fluence Technology Inc., a wholly owned subsidiary of Credence, will be combined with IMS to form a new wholly owned subsidiary called Integrated Measurements Systems Inc., a Credence Company. In addition, Credence shipped multiple KalosXW memory testers to Sanyo Electric Co. Ltd. Sanyo installed the test systems in its Niigata, Japan, fab, and expects to use the units for flash and embedded flash memory devices.

VJ Electronix (Bohemia, N.Y.) expanded its Bohemia facility by 6000 ft2. The facility will house a new customer training center for conducting sessions on X-ray analysis, along with an expanded advanced technology research and support division.

Dyneon LLC (Oakdale, Minn.) achieved ISO recertification for its quality management system at its global manufacturing sites. ISO 9001 and ISO 14001 were achieved at the Gendorf, Germany, site; ISO 9001 and QS 9000 were maintained at the Oakdale, Minn., Aston, Pa., Houston and Decatur, Ala., sites.

Tokyo Electron Ltd. (TEL, Tokyo) and WaferMasters Inc. (San Jose) announced a joint program to develop a 300 mm single-wafer rapid thermal furnace (SRTF). A pilot version of this new system will soon begin evaluations, and the system will be released in 2002.

Karl Suss (Munich, Germany) and DELTA Danish Electronics, Light & Acoustics (Copenhagen, Denmark) are collaborating to develop new methods and equipment for testing MEMS at wafer level with non-electrical stimuli and detection. The project, named MicroTest, will result in new prober equipment from Suss and test services to be offered by DELTA.

Air Liquide America's Electronics Division (Dallas) agreed to acquireBalazs Analytical Laboratory (Sunnyvale, Calif.) to create a new Air Liquide business unit combining both companies'analytical laboratory services. The new business unit will operate from Balazs'cleanroom facility in Fremont, Calif. Financial terms were not disclosed.

AMETEK Inc. (Paoli, Pa.) acquired EDAX Inc. (Mahwah, N.J.) for a price of $37M fromPanta Electronics. The acquisition expands the company's field of materials characterization and further builds its worldwide position in energy-dispersive X-ray analysis.

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