Portable Leak Detector
Staff -- Semiconductor International, 6/1/2009
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The Adixen ASM 310 helium leak detector is lightweight (46 lb) with a small footprint (<140 in.2) that can even be moved while in operation due to its low rotational speed hybrid turbopump. The pump delivers a high cross-over and fast helium recovery. High sensitivity (5×1012 atm•ccsec) and high helium stability allow the detector to be used with dry or wet pumping systems. With its oil-free and clean dry pumping system, the unit is suitable for systems such as semiconductor, solar panel manufacturing and medical process chambers. No maintenance is required for the first 10,000 hr. Alcatel Vacuum Products Inc., Hingham Mass., www.adixen.com
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