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ISMI Publishes Guidelines for Equipment IP Protection

Staff -- Semiconductor International, 1/15/2008

The International Sematech Manufacturing Initiative (ISMI, Austin, Texas) announced a set of guidelines for protecting intellectual property (IP) within process equipment.

The goal is to embed IP protection in equipment software and create a secure framework for tools used by consortia and other collaborative R&D environments. The guidelines protect process recipes, run rates and equipment diagnostic information and encompass the need for key software security technologies, such as role-based security; a limited scope targeted at specific objects and tools; and multiple-use cases covering various combinations of chipmaker and supplier collaborations.

“There has been a question over how to strike a balance between sharing data for operations, and protecting IP investments,” said Scott Kramer, ISMI director.

Specific requirements include:

  • Nondisclosure agreements that detail how technology and process data will be used in a collaboration.

  • A system architecture with adequate controls for access, authentication, user credentials and information removal.

  • Identification by chipmakers of process-related IP, and by toolmakers of equipment IP.

  • Purging of all IP from each tool at the end of its life.

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