Analytical SEM
By Semiconductor International Staff -- Semiconductor International, 7/1/2007
The JSM-7001F is a thermal field emission (FE) analytical SEM that acquires high-resolution micrographs at up to 1,000,000×. It features a lens FE gun that delivers >200 nA of beam current to the sample. An extremely small probe diameter at low kV and high current is optimal for the characterization of nanostructures with a resolution of 1.2 nm at 30 kV. A large specimen chamber designed for samples up to 200 mm accomodates a wide variety of detectors simultaneously. JEOL USA Inc., Peabody, Mass.,www.jeolusa.com
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