CDS Chemical Delivery System
CDS
Staff -- Semiconductor International, 3/1/1998
CDS chemical-delivery system with integrated PLC control is used tosupply wet processes with acids and alkaline solutions. The system can fill wet sinkswithout having to handle flasks. The tool is run via the input key area or the PLC's touchscreen. The system features software, automatic vent start for each barrel, recirculationmode at reduced pressure, an alarm function for detection of air bubbles and statistics onthe used barrels.
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