Failure Analysis Software

ESCOSY

Staff -- Semiconductor International, 4/2/2001

ESCOSY Plus-CAD Navigation is a PC-based navigation software for failure analysis. It runs on analytical tools like SEMs, AFMs, FIBs, PEMs, SIMS, dual-beam systems or optical microscopes, and navigate to fail positions on wafers and in single dies. Features include real-time CAD overlay capability using the GDSII files for navigation. It can import defect data from KLA-Tencor Inspex, Defectfinder and other tools, as well as export data to yield management systems. SEMICON Europa Booth B1-145.

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