Mass Flow Controller
Staff -- Semiconductor International, 3/15/2005
The Aera Transformer MFC Series offers multi-gas and multi-range selection and digital communications. The high-accuracy controller features unlimited gas selection without recalibration, with a flow range of 10 sccm to 30 slm. Transformer MFCs can be easily field-programmed to replace and upgrade any MFC within the device's mechanical limits. Only eight different Transformer models are needed to support most fab requirements. Advanced Energy Industries Inc., Fort Collins, Colo., www.advanced-energy.com.
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