UV Microscope Objective
By Semiconductor International Staff -- Semiconductor International, 8/1/2008
A line of UV lenses has been expanded to include a high-numerical-aperture (NA) UV microscope; NA is 0.90. It provides users with 0.28 μm spot imaging at a wavelength of 248 nm or 0.41 μm spot imaging at a 365 nm wavelength. The effective focal length is 5.5 mm, while field of view is 100 μm. The microscope is diffraction-limited with &0.07 waves RMS wavefront distortion over the entire field of view. Special Optics Inc., Wharton, N.J., www.specialoptics.com
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