Wafer Mapping Sensor
Staff -- Semiconductor International, 1/1/2006
EX-43QS and EX-73QS are high-performance wafer mapping sensors in a smaller package to accommodate limited space applications or where a small sensor footprint is needed. They utilize reflective laser technology and optimizes the sensors’ optical plane geometry to eliminate any potential for stray reflections from FOUPs, cassettes or other wafers. The sensors quickly detect all types of wafers regardless of diameter, edge geometry, thickness or coating. Features include a 0.05 mm laser stripe with multiple apertures and spatial filtering to reduce noise and ensure consistent detection of thin and cross-slotted wafers and an operating temperature range of 0-40°C. CyberOptics Semiconductor Inc., Beaverton, Ore., www.cyberoptics.com.
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