Plasma Abatement System
By Semiconductor International Staff -- Semiconductor International, 8/1/2008
Sirius 6000 is a system designed to address greenhouse gas abatement challenges presented by dielectric and polysilicon etch processes. The design uses an energy-efficient microwave plasma in a carefully controlled chemical environment and an integrated wet scrubber to reduce fab fluorinated gas emissions. Edwards, Crawley, West Sussex, UK, www.edwardsvacuum.com
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