Workstations
SEMICON West 2003-Back End Products
Staff -- Semiconductor International, 6/15/2003
9100 Series vibration isolation workstations can be configured for a wide variety of applications in which external vibrations adversely affect the operation of sensitive equipment. These workstations offer Faraday Cages and other efficiency-improving accessories. Typical applications include analytical balances, cell injection, confocal microscopes, patch clamping, optical microscopes, wafer probing, mask aligning, and atomic force microscopes. They are available with a load capacity of either 800 or 1300 lb (800 lb model is field convertible to 1300 lb). The series is Class 100 cleanroom compatible, with Class 10 available as an option. Units feature a high-performance Active-Air Suspension that provides a vibration-controlled work environment with low natural frequencies and excellent vertical and horizontal isolation efficiencies. A preset zero deflection level is maintained regardless of load addition or removal. Kinetic Systems Inc., Boston. Booth 12010-SJ
Workstation
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