SEM/FIB System
By Semiconductor International Staff -- Semiconductor International, 10/1/2002
LEO 1540 CrossBeam XB SEM/FIB system is a high-resolution FIB workstation that enables nanoscale sub-surface analysis and control. It allows real-time SEM imaging of the FIB milling process at ultrahigh resolution up to 1.0 nm, and simultaneous use of various types of in- and out-lens image detectors. Features include a 6-axis fully motorized specimen stage, and multi-channel gas injection system for using up to five different gases. LEO Electron Microscopy Inc., Thornwood, N.Y.
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