New products for semiconductor manufacturing, including semiconductor capital equipment, materials, and equipment components and subsystems.
Ulvac Readies Resist Residue Removal Tool Staff - 12/05/2008
Ulvac Inc. demonstrated its recently released residue removal tool at SEMICON Japan. The Enviro Xceed 400 tool can remove >10 µm of resist residue per minute. More
Applied Announces TSV Etcher, In-Fab Mask Inspection Capability David Lammers, News Editor - 12/01/2008
Applied Materials Inc. announced its Silvia deep silicon etcher for creation of the smooth sidewalls required for 3-D interconnects. Also, the company said it is offering a new version of its Aera2 mask inspection tool for use within a fab’s lithography cell, rather than at an external mask shop, needed for double patterning.
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Double Patterning Litho Tool 12/01/2008 The Twinscan NXT platform offers significant improvements in overlay and productivity, making it suitable for more advanced lithography, including double patterning techniques. It features a new planar wafer stage design, and a wafer stage that is considerably lighter than previous generations, helping to enable high acceleration for initial productivity improvements of >30%.More
Liquid Level Sensor 12/01/2008 UCL-510 is a compact ultrasonic level sensor suitable for non-contact industrial water treatment, wastewater management, chemical storage, and other challenging fluid applications. The highly accurate and reliable sensor is built for general-purpose, small-tank applications, and offers switch, controller and transmitter capabilities.More
Motion System 12/01/2008 Motion Control for Advanced Technologies (MCAT) is a turnkey platform optimized to reduce development costs and design cycle times for value added resellers (VARs) and OEMs. It provides rejection of environmental vibration, compensation for changing temperatures, and proprietary calibration techniques.More
Jet Dispensing System 12/01/2008 The DispenseJet DJ-100 family of piezoelectric jets combines high production speed with high accuracy and process control. The series has three models: DJ-100 Standard, DJ-100 NC for low-viscosity materials, and DJ-100 GH for highly viscous fluids. With the Jet on the Fly technology, the jet shoots precise volumes of fluids in dots, lines and patterns.More
Test & Burn-in Sockets 12/01/2008 High-frequency center probe and CSP/μBGA test and burn-in sockets are now offered in sizes up to 6.5 mm squared with pitches down to 0.3 mm. The reduced socket pitch meets the growing need to test smaller components while increasing reliability. The sockets feature replaceable interposer sets and require minimal handler tooling for using in an increased number of CSP, μBGA, DSP,...More
CVD and ALD Tool 12/01/2008 AltaCVD is an advanced material CVD and ALD tool that offers new capabilities to R&D facilities and pilot production lines. The combination of a proprietary reactor design and precursor introduction path with a pulsed liquid injection and vaporization enables nanoscale control of thickness, uniformity, composition and stoichiometry in complex materials.More
The Measure of All Things Alexander E. Braun, Senior Editor, Semiconductor International May 13, 2008 A Modest Proposal
For decades now, there has been a desperate wringing of hands and loud, roaring noise... More
Double Patterning Litho Tool 12/01/2008 The Twinscan NXT platform offers significant improvements in overlay and productivity, making it suitable for more advanced lithography, including double patterning techniques. It features a new planar wafer stage design, and a wafer stage that is considerably lighter than previous generations, helping to enable high acceleration for initial productivity improvements of >30%....
Liquid Level Sensor 12/01/2008 UCL-510 is a compact ultrasonic level sensor suitable for non-contact industrial water treatment, wastewater management, chemical storage, and other challenging fluid applications. The highly accurate and reliable sensor is built for general-purpose, small-tank applications, and offers switch, controller and transmitter capabilities....
Motion System 12/01/2008 Motion Control for Advanced Technologies (MCAT) is a turnkey platform optimized to reduce development costs and design cycle times for value added resellers (VARs) and OEMs. It provides rejection of environmental vibration, compensation for changing temperatures, and proprietary calibration techniques....
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Double Patterning Litho Tool
